The technology of using gas discharge plasma to ionize gaseous components, and depositing evaporation or its reactants on the substrate to form a coating at the same time of ion bombardment is a plasma enhanced physical vapor deposition. Hollow cathode discharge ion plating, hot electron enhanced electron beam ion plating, and cathode arc ion plating are widely used. The characteristics of ion plating are that the coating is compact and has high bonding strength due to ion bombardment, and can obtain high-quality coating when the matrix temperature is lower than 550 ℃. As a negative bias voltage is applied to the matrix, the winding plating property is improved. The most outstanding effect of ion plating is the industrialization of titanium nitride wear-resistant coating and titanium nitride decorative coating for high speed steel tools.
No classification at present.