Explanation

The aluminum film is used as the electrode of the capacitor, the end of the resistor, the spiral conductive belt of the inductor, and multi-layer wiring. Its main advantages are: good conductivity (with a square resistance of 0.33 Ω at a thickness of lOOnm), simple film forming process, no need for other metals to "base", good weldability with silicon aluminum wire and gold wire, and low cost. Due to its easy oxidation on the surface, it is beneficial to improve the interlayer insulation of multi-layer wiring. Therefore, aluminum film is the most widely used thin film conductive material in thin film multilayer wiring. The disadvantages of aluminum film are: ① weak resistance to electromigration; ② The imermetallif compound, which forms brittleness with gold, causes the disconnection of solder joints and affects the reliability of components and circuits; ③ The oxide layer on the surface of the aluminum film brings difficulties to soldering.

Classification