Explanation

Also known as pulsed laser ablation (PLA), it is a means of bombarding objects with lasers, and then precipitation the bombarded materials on different substrates to obtain precipitation or films. The system equipment of PLD is simple, on the contrary, its principle is a very complex physical phenomenon. It involves all physical interactions between laser and matter during high-energy Dong pulse radiation impact on solid targets, as well as the formation of plasma plumes, followed by the transfer of melted material through plasma plumes to the heated substrate surface and the final film formation process. Therefore, PLD can generally be divided into the following four stages: ① the interaction between laser radiation and the target; ② The dynamics of molten matter; I ③ Deposition of molten material on the substrate; ④ The nucleation and generation of thin films on the substrate surface. The main advantages of PLD are that it is easy to obtain multi-component films with the expected stoichiometric ratio, which has good compositional retention. The deposition rate is high, the test cycle is short, the substrate temperature requirement is low, and the prepared films are uniform; Process parameters can be adjusted arbitrarily without any restrictions on the type of target material; Huge development potential and great compatibility; It is easy to clean, and can prepare a variety of film materials.

Classification