Explanation
A technique that uses an electron beam with an energy of 1~30keV as the micro beam excitation source (also known as the primary bundle) to illuminate the surface of the analyzed sample in a grating scanning manner, analyze various information generated by the interaction between the incident electron and the surface substance of the sample, and study the shape, composition, and crystallographic properties of the sample surface micro area. The main equipment is a scanning electron microscope.
Classification
Fundamental of Material Science -> Analysis and testing technology of materials